What is MEMSolver?
MEMSolver is one of its kind MEMS analytical software.
MEMSolver is a powerful yet simple design and analysis
tool for researchers, engineers and students working in
the field of Micro Electro Mechanical Systems or MEMS.
MEMS is a highly specialized inter-disciplinary field of
engineering which engages in the development of micro
mechanical sensors, actuators and other micro devices.
Unlike some numerical analysis and finite element analysis
software which require extensive programming skills and
knowledge of the system to create a successful model,
MEMSolver has ready made models and its associated
mathematics wrapped up into one. Learn
what is different?
MEMSolver is used in some of the
most technically advanced nations and universities and
also in some of the least known nations in the MEMS
technology map. MEMSolver attempts to deliver MEMS
knowledge and technology at affordable rates.
General description of the software
In most cases, the physics behind the behavior of MEMS
devices can be expressed by mathematical expressions.
MEMSolver works by creating a mathematical model of the
system and generates analytical solutions to explain the
behavior of the MEMS device. The user just has to enter
the input parameters like length and width of the beam
for example in a user friendly GUI, and the software
will immediately calculate the relevant results and plot
graphs that fully explain the MEMS device or part of it.
The software is divided into five modules namely
mechanics, sensing, actuation, process and data analysis.
Mechanics module is subdivided into three sub sections.
The first subsection being structures where the most
commonly used beams and diaphragm designs are examined.
The second subsection discusses vibration of these
structures, both free and forced vibrations. The third
subsection discusses damping in the form of squeeze film
and slide film damping. The fourth subsection covers topics on
microfluidics which includes design of microfluidic
channels and diffusion. Sensing module discusses sensing
schemes widely used in MEMS namely piezoresistive,
capacitive and piezoelectric sensing for designing pressure sensors and
accelerometers. Actuation module examines the three widely
used means of actuation namely electrostatic, thermal
and piezoelectric applied to some commonly used actuators like parallel
plate, micromirror, comb drive, bimetallic and bimorf
actuators. Process module is
divided into six subsections namely lithography,
oxidation, diffusion, implantation, film deposition and
wet etching. This covers some of the most commonly used
processes used in the development of MEMS devices. The
data analysis module has a die calculator, unit conversion
tool and lists the material properties of commonly used
MEMS materials. |
