Notes
Diaphragms or membranes as it is sometimes called, form the basic
structural element of MEMS pressure sensors. They are easy to
fabricate, offer good dynamic response and can be used over a wide
range of pressures.
This design interface can be used to determine the natural vibration frequency of a square diaphragm. The vibration frequency for the lowest vibration mode can be estimated.
The plot shows the two lowest modal frequencies for the given diaphragm. Those are the frequencies at which there is a sharp rise in amplitude. Using the cross hair tool, those frequencies can be read out from the graph.