Vibration frequency of a round diaphragm
dia diameter of the
diaphragm in µm
thc thickness of
the diaphragm in µm
den density of the
material in kg/m3
ymod Young's modulus of the material of
the diaphragm in GPa
pois Poisson's ratio
denoting the selected result.
Use 2 for vibration frequency
Diaphragms or membranes as it is sometimes called, form the basic
structural element of MEMS pressure sensors. They are easy to
fabricate, offer good dynamic response and can be used over a wide
range of pressures.
This design interface can be used to determine
the natural vibration frequency of a round diaphragm. The vibration
frequency for the lowest vibration mode can be estimated.
The plot shows the two lowest modal frequencies
for the given diaphragm. Those are the frequencies at which there
is a sharp rise in amplitude. Using the cross hair tool, those
frequencies can be read out from the graph.
-The default material is Silicon with a Young's modulus of 180GPa
and Poisson's ratio of 0.3.
-The diaphragm has uniform thickness.
-The diaphragm is assumed to be held rigidly at the outer
perimeter. In reality it may be slightly flexible.
-The property of the material remain constant across the
-The diaphragm is not subjected to any pre-stress, and damping is
Mechanics > Vibration > Free vibration > Diaphragms >