MEMSolver 3.0 Documentation
General overview
Understanding help files
Accessing help files
Table of contents
Mechanics
Structures
Beams
Cantilever
End Loading
Distributed load
Mass at free end
Acceleration load
Clamped beam
Center loading
Distributed load
Central mass
Distributed load
Acceleration load
Buckling stress
Bent beam
Folded beam
Serpentine beam
Torsion bar
Diaphragms
Square diaphragm
Round diaphragm
Bossed diaphragm
Rectangular diaphragm
Vibration
Free vibration
Cantilever
Cantilever beam
Mass at free end
Clamped beam
Clamped beam
Central mass
With axial force
Diaphragms
Square diaphragm
Round diaphragm
Bent beam
Folded beam
Serpentine beam
With damping
Forced vibration
Constant force
Harmonic force
Base excitation
Damping
Squeeze film
Cantilever
Suspended mass
Perforated mass
Slide film
Suspended mass
Fluidics
Microchannels
No Slip
Circle
Square
Rectangle
Triangle
Parabola
With slip
Rectangle
Diffusion
Diffusion coefficient
Spreading
Resting fluid
Moving fluid
Mixing
T-mixer
Separation
H-filter
Sensing
Piezoresistive
Pressure
Square diaphragm
Round diaphragm
Bossed diaphragm
Rectangular diaphragm
Capacitive
Acceleration
Static signal
Step signal
Pulse signal
Piezoelectric
Acceleration
Inertial mass
Thin film
Actuation
Electrostatic
Normal motion
Torsional motion
Lateral motion
Thermal
Bimetallic
Bimorph
Bent beam
Piezoelectric
Longitudinal
Transverse
Process
Lithography
Spin resist
Oxidation
Oxidation time
Diffusion
Diffusion
Diffusion mask
Implantation
Implantation
Implant mask
Film deposition
Film stress
Metal
Evaporation
Polysilicon
Wet etching
KOH etching
Membrane etch
Phosphoric acid
Buffered HF
Data analysis
Unit conversion
Pressure
Temperature
Angle
Distance
Force
Acceleration
Die calculator
Material properties